Importance of higher-level excited species in argon remote plasma sources: Numerical modeling with consideration of detailed chemical reaction pathways
- JOURNAL
- Plasma Processes and Polymers
- DATE
- 2022.06
- VOL. (PP.)
- 19(2100251)
- AUTHOR
- Cheongbin Cheon, Jung Hwan Yoon, Sanghyun Jo, Ho Jun Kim, Hae june Lee
- 사이트