Two-dimensional analysis for the transition from nonlocal to local electron kinetics and its effect on the spatial uniformity of a capacitively coupled plasma
- JOURNAL
- Plasma Processes and Polymers
- DATE
- 2022.11.
- VOL. (PP.)
- 19(2100196)
- AUTHOR
- Chang Ho Kim, Hwanho Kim, Geonwoo Park, Ji Hyun Shin, Hae June Lee
- 사이트