Control of the ion flux and energy distribution of dual-frequency capacitive RF plasmas by the variation of the driving voltagesss
- JOURNAL
- Journal of Vacuum Science & Technology A
- DATE
- 2023.03.27.
- VOL. (PP.)
- 41(023004)
- AUTHOR
- Hwan Ho Kim, Ji Hyun Shin, Hae June Lee
- 사이트